AOI
SWIRE R45 Reel-To-Reel AOI
- 2x SWIR station and 1x visible light simultaneous inspection to hidden silicon defect detection
- Capable of inspecting bare silicon & penetrable back coating
- Tape width 8, 12, 16, 24mm, pocket pitch 2, 4, 8, 12mm
- Patented tape levelling module
- 7” and 13” reel
| Items | Specification |
|---|---|
|
Camera |
2x 5.32 MP SWIR camera (industry’s highest resolution), 1x 12 MP visible light camera (optional)
|
|
Lens |
High- magnification microscope |
|
Light Source |
Internal coaxial shortwave infrared light source
|
|
FOV
|
3.53 mm x 2.83 mm
|
|
Resolution |
1.38um / pixel
|
|
Depth of field
|
±6.8um
|
|
Working Distance |
10mm
|
|
Focus
|
Patented ultra-high-speed auto-focus solution
|
|
Inspection Method
|
AOI + Deep learning
|
|
UPH
|
> 45K (1x1mm)
|